Perfluoroelastomer 75 Durometer O-Ring, Extreme Etch Resista

产品概况：

 

Parker's perfluoroelastomer FF302-75 (Ultra® FFKM) is a black, opaque, non-filled material for the most demanding semiconductor processes. FF302-75 features extreme plasma resistance, minimum metallic ion content, and minimum particle generation making it the best option for improved mean time between maintenance.

• Heat resistance — Up to 300°C (572°F)

• Cold flexibility — Down to -15°C (5°F)

 

Chemical resistance

• Fluorine Plasma (NF3, SF6¬, C¬4F8, etc.)

• Oxygen Plasma (O2, O3¬, etc.)

• HBr and Chlorine Plasmas (HBr, Cl2, etc.)

• Polar solvents (ketones, esters, ethers)

• Inorganic and organic acids

• Water 

• High vacuum with minimal loss in weight

 

 

Used for chemical vapor deposition, etch, and ash/strip processes

 

*Custom sizes and coatings/markings are available upon request. Contact Parker O-Ring & Engineered Seals Division at 859-269-2351 for design and pricing assistance.

 

 

 

性能特点：

名义硬度范围 >70

最小工作温度 (°C)范围 5

最高工作油温（F) 572

市场 Semiconductor

证书 None

符合认证 None

工业标准 North America

内部润滑 No